瞩目产品

Ultra high purity gas products

Low-pressure diaphragm valves KD Series

KD Series

The KD Series includes compactly designed diaphragm valves. 
Realizing high Cv values, they support semiconductor high purity gases. These high-reliability valves combine high durability and high corrosion resistance.

Features

  • With minimized body vertical hole dimensions, excellent gas replacement characteristics are realized through smaller interior volume

  • Realizes high sealing, high durability, degassing performance, and corrosion resistance through a proprietary gas-contact part seal structure

  • High corrosion resistance through carefully selected diaphragm materials and minimized individual variation through proprietary molding methods

  • Particle performance optimized through a clean manufacturing environment and interior polishing

Main specifications

Main specifications

For details, see the product catalog. Access is also available via the button below.

High-pressure diaphragm valves NRD Series

NRD Series

The NRD Series includes valves which support high pressures of 20.6 MPa. 
With a slim and compact design, the lineup includes a wide range of flow rates from small flow to large flow types.

Features

  • Simple, compact design using a new high-output actuator and internal thread body structure

  • Lineup of high flow types NRHD4,
    with a 1/4" size and a slim actuator of outer diameter 39.7 mm, realizes Cv 0.25 NRHD8,
    with a 1/2" size, realizes a Cv 1.0 large flow; manual valves have low-torque handle operation

  • Springless diaphragm structure reduces particles

Main specifications

Main specifications

For details, see the product catalog. Access is also available via the button below.

Low-pressure zero volume valves ZCD Series

ZCD Series

The ZCD Series includes diaphragm valves with minimized internal dead volume (*A part) and enhanced gas replacement characteristics.

Features

  • Dead volume from seat to main flow path is minimized at valve closing, realizing superb gas replacement characteristics Reduced by 86% from our 1/4" KD type

  • Forcible lift of the lift part diaphragm prevents vacuum closure and improves opening speed

  • Replaceable structure allows users to replace the seat assembly

Low-pressure zero volume valves ZCD Series

Main specifications

Main specifications

For details, see the product catalog. Access is also available via the button below.

Low-pressure general-purpose diaphragm valves VLD Series

VLD Series

The VLD Series includes general-purpose diaphragm valves based on our KD Series, intended for ease of use and simplicity. The number of drive parts is minimized in order to simply the valve.

Features

  • The basic performance, materials, and cleanliness of the KD Series have been retained, while reviewing parts, changing machining methods, and reducing part counts, realizing safe and low-priced valves

  • Realizing reliability and durability equivalent to the conventional model, through equivalent cleaning and inspection processes

  • Particle performance optimized to support semiconductor high purity gas through highest-level manufacturing environments and interior polishing

Main specifications

Main specifications

For details, see the product catalog. Access is also available via the button below.

Mechanical metal gasket surface seal fittings CVC Series

CVC Series

The CVC Series includes mechanical metal gasket surface seal fittings which can be used in high purity gas piping, with our proprietary electropolishing surface treatment and cleanroom inspection and packaging.

Features

Components

Components
  • Female nut (NF): Female thread is given silver plating and seizing/galling prevention, ensuring solid tightening

  • Sleeve (S): Smooth interior finish with our proprietary electropolishing, etc.

  • Gasket (G): Made of nickel as standard, realizing high sealability with sleeve through tightening

  • Male nut (NM): Rolled screw use for high strength and solid connection

Main specifications

Product code list

Product code list

For details, see the product catalog. Access is also available via the button below.

Automatic welding fittings SCM/SCL Series, SCF Series

SCM/SCL Series, SCF Series

The SCM/SCL and SCF Series include high-quality automatic welding fittings with the excellent characteristics essential for high-purity, high-reliability semiconductor manufacturing processes.

Features

  • Use of refined stainless steel enabling excellent welding capacity for materials

  • Our unique electropolishing technology is available as an option for high purity gas piping applications

  • Product cleanliness is ensured by washing, inspection, and packaging in cleanrooms

  • With a neck (straight piping section) suited to automatic welding attached, high-quality welding is easy

Main specifications

SCM/SCL Series Product code list

SCM/SCL Series Product code list

SCF Series Product code list

SCF Series Product code list

For details, see the product catalog. Access is also available via the button below.

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