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L-type vacuum bellows heated valves are vacuum valves with an embedded spiral heater following bellows movement, heating the valve body and bellows. Heating from within the bellows eliminates cold spots and enables reduced adhesion of generated material.

The structure enables heating from within the valve, previously impossible with conventional products. Therefore, reaction byproduct adhesion is dramatically reduced, sharply extending maintenance periods and preventing particle reverse expansion.
Bellows internal heater (patented) and external heater temperature can be individually set.
The internal heater can be operated integrally with the valve body, heating both the valve body and the bellows at once whether the valve is open or closed.
Ideal for processes such as metal etching, CVD, and ALD.
Supports flanges including ISO-KF, JIS-VF, ConFlat rotating flanges, ISO-MF, and so on.
A connector can be mounted on the heater and thermocouple cable as well.

Max heating temperature
Controller setting 180°C
Temperature control method
In accordance with temperature controller using K-type thermocouple
Operating pressure
1 × 10-6 to 2 × 105 Pa (abs.) [0.1 MPa]
Standard material
Body: SUS304 Bellows: SUS316L Actuator A6063 O-ring: FKM *Materials not indicated are also supported. Inquire for details.
Operating pressure
0.4 to 0.7 MPa (G)
Leak rates
Across-the-seat He leak rate: 1 x 10-10 Pa・m3/s or less Inboard He leak rate: 1 x 10-10 Pa・m3/s or less
Operating voltage
AC100V

・ The slow vacuum line is integrated with the main valve structure, enabling minimized footprints and reduced costs on exhaust lines.
・ The bypass valve can be heated at the same time as the main valve body heater.
・ Flow rate fixed and variable types are available for the bypass line.

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L-type vacuum bellows heated valves

Features

Main specifications

Soft exhaust function (option)