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L-type vacuum bellows heated valves

L-type vacuum bellows heated valves

L-type vacuum bellows heated valves are vacuum valves with an embedded spiral heater following bellows movement, heating the valve body and bellows. Heating from within the bellows eliminates cold spots and enables reduced adhesion of generated material.

Features

  • The structure enables heating from within the valve, previously impossible with conventional products. Therefore, reaction byproduct adhesion is dramatically reduced, sharply extending maintenance periods and preventing particle reverse expansion.

  • Bellows internal heater (patented) and external heater temperature can be individually set.

  • The internal heater can be operated integrally with the valve body, heating both the valve body and the bellows at once whether the valve is open or closed.

  • Ideal for processes such as metal etching, CVD, and ALD.

  • Supports flanges including ISO-KF, JIS-VF, ConFlat rotating flanges, ISO-MF, and so on.

  • A connector can be mounted on the heater and thermocouple cable as well.

Main specifications

Max heating temperature

Controller setting 180°C

Temperature control method

In accordance with temperature controller using K-type thermocouple

Operating pressure

1 × 10-6 to 2 × 105 Pa (abs.) [0.1 MPa]

Standard material

Body: SUS304
Bellows: SUS316L
Actuator A6063
O-ring: FKM
*Materials not indicated are also supported. Inquire for details.

Operating pressure

0.4 to 0.7 MPa (G)

Leak rates

Across-the-seat He leak rate: 1 x 10-10 Pa・m3/s or less
Inboard He leak rate: 1 x 10-10 Pa・m3/s or less

Operating voltage

AC100V

Soft exhaust function (option)

Soft exhaust function (option)

・ The slow vacuum line is integrated with the main valve structure, enabling minimized footprints and reduced costs on exhaust lines. 
・ The bypass valve can be heated at the same time as the main valve body heater. 
・ Flow rate fixed and variable types are available for the bypass line.

Soft exhaust function
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