瞩目产品
General-purpose square gate valves
In compliance with the SEMI E21.1-1296 standard, square vacuum gate valves for 300 mm wafers use a new non-sliding mechanism, reducing particles and enhancing reliability.
Features
Realizing low particle generation
With a new non-sliding mechanism, factors in particle generation during valve open/close action have been minimized.
Improved seal part reliability
Bonded seal type (O-ring adhesion type) available as an option.
Preventing O-ring fallout and retaining stable seal performance, the effect also further reduces particle generation.
Main specifications
- Gate size
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50mm×336mm
- Operating pressure
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1×10-8 Pa~0.1MPa
- Max operating temperature
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Body: 120°C
Environment: 80°C (room temperature specifications) - External heater setting maximum temperature
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180°C *External heater is an option
- Operation type
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Double action
- Operation durability count
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3 million cycles